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enervac SF6 N2 Mixtures End of Life Services

enervac SF6 N2 Mixtures End of Life Services

II.2.2 SiO2 etching using SF6/N2/O2 chemistry The transfer of resist patterns to underneath SiO2 materials by RIE using SF6/N2/O2 mixtures has also been investigated; details are given in IR3.3.3. As emphasized therein, such gas mixtures lead to isotropic SiO2 structures with a very low SiO2 etch rate (~ 7 nm/min).

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